Semi-Conductor

Semi-Conductor

Epi Reactors, Rapid Thermal Heaters and Memory Disk Heaters all have been improved by re-plating with Laser Gold. ETI both fabricates from scratch and/or re-plates your existing reflectors on the AMT, ASM, Intevac and Moore Technology heater systems. A patented improvement in the reflector increased shape for EPI reactors has produced the ability to guarantee lamp life for one year with uniformity at the wafer.

Lamp Array for Applied Materials Technology Rapid Thermal Processor
Lamp Array
Interior of an Induction Heated Epi-reactor
Interior of an Induction Heated Epi-reactor

Interior of an induction head epi-reactor

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Applied Materials Barrel Reactor
Applied Materials Barrel Reactor

Applied Materials Barrel Reactor

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Epitaxial Reactor Chamber
Epitaxial Reactor Chamber
Compound Parabolic Reflector
Compound Parabolic Reflector

Patented Compound Parabolic Reflector for AMT Epi Barrel Reactor

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Compound Parabolic Reflector
Compound Parabolic Reflector

Patented Compound Parabolic Reflector for AMT Epi Barrel Reactor

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Infrared Reflector Disc Processor
Infrared Reflector Disc Processor